Sensirion SFM6000D Mass Flow Meters

Sensirion SFM6000D Mass Flow Meters are valve-less SFC6000 mass flow controller variants. The Sensirion SFM6000D offers performance at a low price. The meters are small, lightweight, and ideal for optimizing the size and weight of portable devices. With excellent repeatability, accuracy, control range, and speed, this highly integrated meter is built using CMOSens® MEMS technology.

Features

Unbeatable price-performance ratio with 2%/0.2% accuracy/repeatability
Opens up applications where a mass flow controller is traditionally too costly
Wide control range (0.2%-100% full scale)
Calibrated for multiple gasses with exchangeable fittings

Digital RS485 interface
Compact and lightweight
Integrated design with few electronic components
Robust supply chain to enhance supply safety
No drift and re-calibration is required in the field
EK-F5x evaluation kit for quick and easy testing

Applications

Semiconductor
Analytical instruments

Medical equipment
Industrial automation

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