Sensirion SFM5500 Mass Flow Meters

Sensirion SFM5500 Mass Flow Meters are high-precision sensors with different calibrations and flow ranges ranging from 10slm down to 50sccm full-scale. Sensirion SFM5500 Mass Flow Meters feature exchangeable push-in fittings and a digital interface. These mass flow meters utilize Sensirion CMOSens® technology, which combines a high-precision sensor element with state-of-the-art signal processing on a single chip.

Features

10slm max flow rate
Excellent accuracy and repeatability (0.8%/0.1% of setpoint, respectively)
<0.1% to 100% full-scale control and measurement range
G ¼” flange compatible with a broad range of connectors, including Swagelok, Legris, Festo
Calibrated for multiple gases (air, N₂, O₂, H₂, He, CH₄, N₂O, Ar, CO₂)
Digital interface with temperature-compensated output

<100ms settling time
Up to 10bar pressure resistance
169 years mean time between failures (MTBF)
No drift and no re-calibration required in the field
NIST-traceable calibration

Applications

Analytical instrumentation
Coating/etching equipment
Medical equipment

Process automation
Gas mixing

Sensirion SFM5500 Mass Flow Meters

Features

Applications

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