Sensirion SFC6000D Mass Flow Controllers

Sensirion SFC6000D Mass Flow Controllers are small, lightweight, and ideal for optimizing the size and weight of portable devices. The Sensirion SFC6000D has excellent repeatability, accuracy, control range, and speed. This highly integrated controller uses Sensirion’s CMOSens® MEMS technology and thermal-mass measurement principle. The SFC6000 doesn’t drift or require in-service re-calibration, thanks to a low number of electronic components. Selected configurations are available for immediate delivery.

Features

Price-performance ratio with 2%/0.2% accuracy/repeatability
Opens up applications where a mass flow controller is traditionally too costly
Wide control range (0.2%-100% full scale)
Calibrated for multiple gasses with exchangeable fittings
Digital RS485 interface

Compact and lightweight
Integrated design with few electronic components
Robust supply chain to enhance supply safety
No drift and re-calibration is required in the field
EK-F5x evaluation kit for quick and easy testing

Applications

Semiconductor
Analytical instruments

Medical equipment
Industrial automation

Sensirion SFC6000D Mass Flow Controllers

Features

Applications

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