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Sensirion SFC5500/SFM5500 Mass Flow Controllers/Meters are digital multi-gas CMOSens®-based devices that measure gas mass flow by the calorimetric principle based on heat transfer. The controllers/meters achieve unmatched ratings for speed, accuracy, and repeatability at a very attractive system cost. A heater element on a thermally insulated membrane and two thermopiles located upstream and downstream are integrated on a single silicon chip. In the presence of gas flow, the temperature distribution up and downstream is disturbed. This asymmetry is then measured. A larger channel design makes the device more robust against particles, clogging, and humidified gases. Due to the compact single-chip design and mounting between metal parts, CMOSens®-based sensors are also very resistant to electromagnetic disturbances (EMC).
A fully compensated flow measurement value can be delivered every millisecond with amplification, A/D conversion, digital linearization, and temperature compensation matched to the sensor speed. The SFC5500 mass flow controllers show zero-drift performance and control true mass flow independently of the ambient temperature and pressure changes. A special arrangement of the two temperature sensors, on-chip temperature compensation, and the minimization of noise sources lead to unbeatable performance with regards to repeatability and accuracy over a large dynamic range.
