Sensirion SFM3013 Digital Mass Flow Meters

Sensirion SFM3013 Digital Mass Flow Meters are versatile, bidirectional flow meters with low pressure drop and superior stability against overpressure. These next-generation flow meters feature robustness to overpressure (up to 1 bar gauge pressure) and are calibrated for air, oxygen, and air/oxygen mixtures. This series can also be calibrated for heliox gas mixtures as an option. The SFM3013 meters utilize Sensirion’s patented CMOSens® technology, which combines a thermal sensor element, signal processing, and digital calibration on a single microchip for fast signal processing. Sensirion SFM3013 Digital Mass Flow Meters are ideal for a variety of medical and industrial applications, including ventilation, anesthesia, inhalers, spectroscopy, and more.

Features

  • Flow range up to 300SLM
  • Calibrated for O2, air, and mixtures thereof; can be calibrated for heliox gas mixtures as an option
  • I2C interface
  • Low pressure drop across the sensor
  • No recalibration needed
  • Up to 1 bar gauge pressure
  • CMOSens technology
    • High reliability and long-term stability
    • Industry-proven technology
    • Designed for mass production
    • High process capability
    • Scalability

Applications

  • Medical ventilation: inspiratory flow measurements
  • Anesthesia, inhalers, and other medical instruments
  • Process automation
  • Burner control
  • Fuel cell control
  • Spectroscopy
  • Environment monitoring
  • Laboratory/analytical instruments

Sensirion SFM3013 Digital Mass Flow Meters